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Micronano-mechatronics and its Biomedical applications

研究成果Research achievement

2017年度

学術論文(Journal paper)

(4) Y. Hasegawa, H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida, Respiration and Heartbeat Signal Detection from Airflow at Airway in Rat by Catheter Flow Sensor with Temparature Compensation Function, Journal of Micromechanics and Microengineering, vol.27, 12, (2017), DOI: 10.1088/1361-6439/aa9595.

(3) Y. Hasegawa, C. Okihara, T. Yamada, K. Komatsubara, K. Iwano, Y. Sakai, M. Shikida, Smooth-surfaced flexible wall shear stress sensor fabricated by film transfer technology, Sensors & Actuators: A. Physical, (2017), DOI: 10.1016/j.sna.2017.08.016

(2) M. Shikida, P. Kim, S. Shibata, Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor, Microsystem Technologies, Vol. 23, No.8, pp. 3547-3558, (2017), DOI: 10.1007/s00542-016-3168-9

(1) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Heartbeat Signal Detection From Analysis of Airflow in Rat Airway Under Different Depths of Anaesthesia Conditions, IEEE Sensors Journal, Vol. 17, Issue.14, pp. 4369-4377, July 15, (2017), DOI:10.1109/JSEN.2017.2707594

国際会議(International Conference)

(5) Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Small-Footprint Thermal Sensor Detecting Airflow at Mouth in Baby, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040359

(4) T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of Catheter Flow Sensor for Breathing Measurements at Different Levels of Tracheobronchial Airway, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040356

(3) S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Micromachined Tube Type Thermal Flow Sensor for Adult-Sized Tracheal Intubation Tube, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040357

(2) Y. Nabekura, H. Fukuyu, Y. Hasegawa, M. Shikida, Fabrication of Sharp Tip-Separable Microneedle Device for Trans-Dermal Drug Delivery Systems, Proceedings of Eurosensors2017, Paris, France, Sep. (2017), DOI:10.3390/proceedings1040304

(1) C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Integration of flow sensor and optical fiberscope for in-situ breathing and surface image evaluations in small airway, Tech. Dig. of 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Kaohsiung, Taiwan, Jun. (2017), pp.1692-1695.

2016年度

学術論文(Journal paper)

(6) M. Shikida, Y. Niimi, S. Shibata, Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application, Microsystem Technologies, Vol. 23, No.3, pp. 677-685, (2017), DOI 10.1007/s00542-015-2704-3

(5) K.Taniguchi, H. Chiaki, M. Kurosawa, A. Nishikawa, A Novel Earphone Type Sensor for Measuring Mealtime: Consideration of the Method to Distinguish between Running and Meals, Sensors, 17(2), 252, (2017), DOI 10.3390/s17020252

(4) N. Harada, Y. Hasegawa, R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Characterization of basket-forceps micro-flow-sensor for breathing measurements in small airway, Microsystem Technologies, (2017), DOI 10.1007/s00542-016-3265-9

(3) M. Shikida, T. Matsuyama, T. Yamada, M. Matsushima, T. Kawabe, Development of implantable catheter flow sensor into inside of bronchi for laboratory animal, Microsystem Technologies, Vol. 23, No.1, pp. 175-185, (2017), DOI: 10.1007/s00542-015-2663-8

(2) K. Imaeda, K. Bessho, M. Shikida, Design and fabrication of differently shaped pyramids on Si {100} by anisotropic wet etching, Microsystem Technologies, Vol. 22, No.12, pp. 2801-2809, (2016), DOI 10.1007/s00542-015-2590-8

(1) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy, Microsystem Technologies, Vol. 22, No.6, pp.1181-1188, (2016), DOI: 10.1007/s00542-015-2807-x

国際会議(International Conference)

(10) M. Kurosawa, K. Taniguchi, A. Nishikawa, Earable: A Novel Earphone-type Wearable Sensor and Its Applications, The 5th Annual Conference of AnalytiX-2017, Fukuoka, Japan, 22-24 Mar, 2017, Session 7-4.

(9) H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe and M.Shikida, Breathing Signal Analysis of Mouse during Drug Inhalation, Proccedings of 29th International Microprocesses and Nanotechnology Conference (MNC2016), Kyoto, Japan, 8-11 Nov, 2016, 11D-10-3.

(8) Y. Hasegawa, N. Harada, M. Matsushima, T. Kawabe and M.Shikida, Effect of Guide Tube Length on Sensor Output in Inspired Airflow Measurement, Proccedings of 29th International Microprocesses and Nanotechnology Conference (MNC2016), Kyoto, Japan, 8-11 Nov, 2016, 11D-10-4.

(7) Y. Nabekura, Y. Hasegawa, M. Shikida, Embedded wire-electrode into biodegradable micro needle device for brain-machine interface, Proccedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-2-59.

(6) H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Measurement of heartbeat signals from airflow at mouth in rat by catheter flow sensor, Proccedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-6-207.

(5) C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Development of cylinder hollow structure with flow sensor by film transfer technology, Proccedings of IEEE Sensors 2016, Orlando, USA, 30 Oct-2 Nov, 2016, A-6-213.

(4) S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida, Response Time Shortening in Thermal Catheter Flow Sensor, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1114)

(3) Y. Nabekura, K. Imaeda, Y. Hasegawa, M. Shikida, Insertion of Tip-separable Microneedle Device for Trans-dermal Drug Delivery Systems, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1115)

(2) C. Okihara, Y. Hasegawa, M. Shikida, Smooth Surfaced Shear Stress Sensor with High Time Resolution, Proceedings of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), Kanazawa, Japan, 26-29 June, 2016, (#1116)

(1) N. Harada, R. Ono, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Micro flow sensor integration onto basket forceps for pulmonary function evaluation, Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, 2016, C1L-A-3 (#1194)

2015年度

学術論文(Journal paper)

(1) T. Ando, M. Shikida, K. Sato, Effect of temperature and humidity on degradation of single crystal silicon microbeam in micro-resonator, Sensors and Materials, Vol. 28, No.2, pp. 113-120, (2016), DOI: 10.18494/SAM.2016.1161

国際会議(International Conference)

(9) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Detection of kinetic heartbeat signals from airflow at mouth by catheter flow sensor with temperature compensation, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Shanghai, China, Jan.(2016), pp.359-362.

(8) Y. Hasegawa, T. Yamada, M. Shikida, Fabrication of smooth-surfaced flexible thermal sensor for detecting wall shear stress, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Shanghai, China, Jan. (2016), pp.1010-1013.

(7) (invited)M. Shikida, Development of micro-needles based on MEMS technologies for trans-dermal drug delivery system, Proceedings of IEEE NANOMED 2015, Hawaii, USA, Nov. (2015)

(6) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida, Extraction of heartbeat signal from airflow at mouth by flow sensor, Proccedings of IEEE SENSORS 2015, Busan, Korea, Nov. (2015), pp.279-282.

(5) K. Imaeda, S. Shibata, M. Matsushima, T. Kawabe, M. Shikida, Responsible time shorting of flexible thermal flow sensor for medical application, Proccedings of IEEE SENSORS 2015, Busan, Korea, Nov. (2015), pp.283-286.

(4) K. Imaeda, K. Bessho, M. Shikida, Sharp tip-separable microneedles device for trans-dermal drug delivery systems, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1715-1718.

(3) H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida, Detection of both heartbeat and respiration signals from airflow at mouth by single catheter flow sensor, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1755-1758.

(2) N. Harada, R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Basket forceps with flow sensor for evaluating breathing characteristics in small airway, Tech. Dig. of 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, USA, Jun. (2015), pp.1743-1746.

(1) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy, JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE), Kobe International Conference Center, Kobe, Japan, June, (2015), TuB-1-1.

2014年度

学術論文(Journal paper)

(10) M. Shikida, Y. Niimi, T. Hasegawa, T. Sugino , S. Hamaoka, K. Fukuzawa, Mechanical strengthening of Si cantilever by chemical KOH etching and its surface analysis by TEM and AFM, Microsystem Technologies, 21, pp. 661-668, (2015), DOI: 10.1007/s00542-014-2075-1.

(9)J. IL Lee, M. Shikida, K. Sato, Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer, Microsystem Technologies, 21, pp. 239-246, (2015), DOI: 10.1007/s00542-013-1961-2.

(8) M. Shikida, S. Kitamura, C. Miyake, K. Bessho, Micromachined pyramidal shaped biodegradable microneedle and its skin penetration capability, Microsystem Technologies, 20, pp. 2239-2245, (2014) DOI: 10.1007/s00542-013-1924-7

(7) T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, On the measurement of wall shear stress with a patch-type micro-fabricated hot-film sensor, Journal of Fluid Science and Technology, vol. 9, 3, pp.1-13, (2014).

(6) T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, Measurement of Wall Shear Stress Fluctuation with the Micro-fabricated Hot-film sensor in a Boundary Layer of a Wall Jet, Journal of Japanese Society for Experimental Mechanics, Vol. 14 (2014), s13-s18 (6 pages). (ISEM 2013 特集号)

(5) K. Fukuzawa, S. Hamaoka, M. Shikida, S. Itoh, H. Zhang, Lateral-Deflection-Controlled Friction Force Microscopy, Journal of Applied Physics, 116, 084311 (2014)

(4) J. IL Lee, H. Shin, M. Shikida, K. Sato, Structural design of polymer-based tactile sensor with table-shaped sensing pad, Microelectronic Engineering, Vol.127, 5 September (2014), pp. 1?6

(3) M. Shikida, K. Yoshikawa, T. Matsuyama, Y. Yamazaki, M. Matsushima, T. Kawabe, Catheter flow sensor with temperature compensation for tracheal intubation tube system, Sensors and Actuators A, pp. 155-160, (2014), DOI: 10.1016/j.sna.2013.08.004

(2) 松山拓矢, 山ア雄大, 松島充代子, 川部勤, 式田光宏, 呼気吸気計測を目的とした自己温度補償型カテーテル流量センサの開発, 電気学会論文誌E(センサ・マイクロマシン部門誌), 134, 6, pp. 126-131, (2014).,DOI: 10.1541/ieejsmas.134.126

(1) M. Mizoshiri, M. Mikami, K. Ozaki, M. Shikida, S. Hata, Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method, Applied Physics Express, 7, 057101 (2014)

国際会議(International Conference)

(10) P. Kim, S. Shibata, M. Shikida, Vacuum cavity formation for high thermal isolation in flexible thermal sensor, Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference, Estoril, Portugal, Jan. (2015), pp.845-848.

(9) S. Muramatsu, Y. Sakai, K. Nagata, M. Shikida, Y. Ito, Measurement of wall shear stress in a boundary layer of a turbulent wall jet with two types of MEMS sensors, The 5th International conference on Mechanical Engineering, December 17-19, Chiang Mai, Thailand, (2014)

(8) R. Ono, M. Matsushima, T. Kawabe, M. Shikida, Wearable displacement sensor system based on elevating tube for measuring breathing pattern, Proccedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 1161-1164.

(7) K. Imaeda, K. Bessho, M. Shikida, Sharp needle tip formation based on triangular pyramidal structure, Proccedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 558-561.

(6) S. Shibata, Y. Niimi, M. Shikida, Flexible thermal MEMS flow sensor based on Cu on polyimide substrate, Proccedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 424-427.

(5) T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida, Implantable catheter flow sensor with legs in air passage for laboratory animal, Proccedings of IEEE Sensors 2014, Valencia, Spain Nov. (2014), pp. 253-256.

(4) K. Imaeda, K. Bessho, C. Miyake, M. Shikida, Penetration capability of pyramidal shaped micro-needles into skin, Tech. Dig. of Asia-Paciific Conference on Transducers and Micro-Nano Technology, Daegu, Korea, June-July, (2014), p. P2-7.

(3) T. Yamada, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida, Micromachined catheter flow sensor for measurement of breathing characteristics in a bronchial region, Tech. Dig. of Asia-Paciific Conference on Transducers and Micro-Nano Technology, Daegu, Korea, June-July, (2014), p. P2-6.

(2) S. Arakane, M. Mizoshiri, T. Maetani, M. Shikida, S. Hata, Direct reduction of copper nanoparticles using femtosecond laser pulses copper micropattern, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, ICMP2014, June 9-13, 2014, Detroit, Michigan, USA

(1) M. Mizoshiri, M. Mikami, K. Ozaki, M. Shikida, S. Hata, The effect of metal buffer layers on open-circuit voltage of thin-film thermoelectric modules, Proceedings of the JSME/ASME 2014 International Conference on Materials and Processing, ICMP2014, June 9-13, 2014, Detroit, Michigan, USA


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